




Gas line
● Multi-functional integration and automatic switching enhance the system’s automation level, as well as safetyand reliability
● Compact structure, space saving and facilitated installation and maintenance
● Customized services, with panel sizes tailored to user requirements
Classification:
Key words: high purity chemical packaging container | precursor material | special gas cabinet and delivery system
Details
Products Introduction
Product Name | Sizes | Features | Technical Specifications | Usage |
Gas line | Design, process and manufacture according to customer requirements | 1.Multi-functional integration and automatic switching enhance the system’s automation level, as well as safetyand reliability 2.Compact structure, space saving and facilitated installation and maintenance 3.Customized services, with panel sizes tailored to user requirements |
SEMI standards | 1.Machine VMB,Gas box 2.Pipeline 3.Laboratory panel 4.Dispensing and cleaning pipeline |
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