High-purity precursor material canister /bubbler

● Piping and Valves: 316L Stainless Steel; EP Bottle Body: 316L Stainless Steel
● Internal EP process，Ra≤0.25um
● Tested by national inspection agencies, UN certification available

Classification:

High-purity precursor material canister

Key words: high purity chemical packaging container | precursor material | special gas cabinet and delivery system

+8618729172088

immediate consultation

Details

Products Introduction

Product Name	Sizes	Features	Technical Specifications	Usage
High-purity precursor material canister /bubbler	2gal, 5gal, 10gal, etc 1L, 1.2L, 1.8L, 3L, 7L, 10L, etc Other sizes based on customer requirements	1.Piping and Valves: 316L Stainless Steel; EP Bottle Body: 316L Stainless Steel 2.Internal EP process，Ra≤0.25um 3.Tested by national inspection agencies, UN certification available	Chemical purity≥99.999%	Infilled chemicals: TEOS, HCDS, etc

High-purity precursor material canister /bubbler size sheet

Sizes	200ml	500ml	1L	1.2L	1.5L	2L	4.3L	11L	16L
A	50mm	75mm	105mm	125mm	132.5mm	132.5mm	168mm	217mm	271mm
B	154mm	168mm	168mm	150mm	140mm	188mm	250mm	370mm	310mm
C	286mm	292mm	300mm	295mm	255mm	329mm	348mm	482mm	427.2mm
D	299mm	305mm	300mm	308mm	255mm	329mm	354mm	485mm	350.2mm
E	13mm	13mm	Omm	13mm	Omm	Omm	6mm	3mm	77mm
F	83mm	83mm	83mm	83mm	90mm	70mm	52.5mm	89.5mm	122mm
Temperature measurement hole	be	be	be	be	be	be	be	be	be
Interface	VCR-M/F	VCR-M/F	VCR-M/F	VCR-M/F	VCR-M/F	VCR-M/F	VCR-M/F	VCR-M/F	VCR-M/F

Graphic Drawings

High-purity precursor material canister /bubbler size sheet

Sizes	2gal	5gal	10gal
A	233mm	233mm	306mm
B	262mm	542mm	586.5mm
C	335mm	610mm	683mm
D	330mm	610mm	683mm
E	5mm	0mm	0mm
F	146mm	146mm	228mm
Temperature measurement hole	be	be	be
Interface	VCR-M/F	VCR-M/F	VCR-M/F

Graphic Drawings

None

High-purity solid precursor canister

None

High-purity solid precursor canister

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Jiangsu Leadchem Semiconductor Technology Co., LTD

Address: 208 Changjiang East Road, Xinwu District, Wuxi City, Jiangsu Province

QQ：915815456

Sales Phone:+86 18729172088 +86 15720869969

E-mail:rdxs@leadchemtech.com

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