
Electronic specialty gas cylinder
● Electrochemically polished (EP),Ra≤0.2um
● Available for the safe storage and transportation of various gases
● Valves can be selected based on product characteristics
Classification:
Key words: high purity chemical packaging container | precursor material | special gas cabinet and delivery system
Details
Products Introduction
Product Name | Sizes | Features | Technical Specifications | Usage |
Electronic specialty gas cylinder | 10L、28L、30L、40L、47L、200L,etc | 1.Electrochemically polished (EP),Ra≤0.2um 2.Available for the safe storage and transportation of various gases 3.Valves can be selected based on product characteristics |
TSG23-2021《Safety Technical Code for Gas Cylinders》 GB/T32566-2016《 Welded Stainless Steel Gas Cylinders》 |
Infilled gases: WF6, HF, ClF3, BCl3,SiH2Cl2, etc |
Nominal capacity of gas cylinder | Cylinder Length(mm) | Total length of cylinder(mm) | Maximum charge/kg | ||||
WF6 | HF | ClF3 | BCl3 | SiH2Cl | |||
28L | 750 | 947 | 61.4 | 23.3 | 45.1 | 33.6 | 25.2 |
30L | 820 | 1017 | 68.7 | 24.9 | 48.3 | 36 | 27 |
35L | 950 | 1147 | 80.2 | 29.1 | 56.4 | 42 | 31.5 |
38L | 1050 | 1247 | 87 | 31.5 | 61.2 | 45.6 | 34.2 |
40L | 1150 | 1347 | 91.6 | 33.2 | 64.4 | 48 | 36 |
45L | 1250 | 1447 | 103.1 | 37.4 | 72.5 | 54 | 40.5 |
47L | 1300 | 1497 | 107.6 | 39 | 75.7 | 56.4 | 42.3 |
50L | 1400 | 1597 | 114.5 | 41.5 | 80.5 | 60 | 45 |
52L | 1450 | 1647 | 119.1 | 43.2 | 83.7 | 62.4 | 46.8 |
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