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Electronic specialty gas cylinder

● Electrochemically polished (EP),Ra≤0.2um
● Available for the safe storage and transportation of various gases
● Valves can be selected based on product characteristics

Key words: high purity chemical packaging container | precursor material | special gas cabinet and delivery system

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Products Introduction

Product Name Sizes Features Technical Specifications Usage
Electronic specialty gas cylinder 10L、28L、30L、40L、47L、200L,etc 1.Electrochemically polished (EP),Ra≤0.2um
2.Available for the safe storage and transportation of various gases
3.Valves can be selected based on product characteristics
TSG23-2021《Safety Technical Code for Gas Cylinders》
GB/T32566-2016《 Welded Stainless Steel Gas Cylinders》
Infilled gases: WF6, HF, ClF3, BCl3,SiH2Cl2, etc

 

Nominal capacity of gas cylinder Cylinder Length(mm) Total length of cylinder(mm) Maximum charge/kg
WF6 HF ClF3 BCl3 SiH2Cl
28L 750 947 61.4 23.3 45.1 33.6 25.2
30L 820 1017 68.7 24.9 48.3 36 27
35L 950 1147 80.2 29.1 56.4 42 31.5
38L 1050 1247 87 31.5 61.2 45.6 34.2
40L 1150 1347 91.6 33.2 64.4 48 36
45L 1250 1447 103.1 37.4 72.5 54 40.5
47L 1300 1497 107.6 39 75.7 56.4 42.3
50L 1400 1597 114.5 41.5 80.5 60 45
52L 1450 1647 119.1 43.2 83.7 62.4 46.8

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Jiangsu Leadchem Semiconductor Technology Co., LTD

Address: 208 Changjiang East Road, Xinwu District, Wuxi City, Jiangsu Province

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Sales Phone:+8618729172088  +8615720869969

E-mail:rdxs@leadchemtech.com

 

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